Supports: racks – Special article – Platelike
Patent
1996-12-05
1998-08-18
Cuomo, Peter M.
Supports: racks
Special article
Platelike
10815718, A47G 1908
Patent
active
057947988
ABSTRACT:
A wafer holder is provided which more stably supports a transferred wafer and prevents interference between a wafer stopper and other elements of the wafer holder. The wafer holder includes a wafer guiding section having a centrally and inwardly inclined surface for stably guiding a wafer, a wafer support section formed at an inner side of the wafer guiding section and having a wider width for more stably supporting the wafer, and a pair of spaced-apart rectangular wafer stopper holes formed between the wafer guiding section and the wafer support section, and having a predetermined size that is wider in the circumferential direction of the wafer support section than in the radial direction. The wafer holder acts to prevent interference between the wafer stopper and other elements when the wafer stopper and the arm move up and down.
REFERENCES:
patent: 2650269 (1953-08-01), Webb
patent: 4569452 (1986-02-01), Schulke
patent: 5016142 (1991-05-01), White
patent: 5048679 (1991-09-01), Thomas
patent: 5669513 (1997-09-01), Oh et al.
Anderson Gerald A.
Cuomo Peter M.
Samsung Electronics Co,. Ltd.
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