Material or article handling – Horizontally swinging load support – Swinging about pivot
Patent
1990-07-02
1992-01-14
Spar, Robert J.
Material or article handling
Horizontally swinging load support
Swinging about pivot
254 243, 901 30, B25J 1500
Patent
active
050805495
ABSTRACT:
Wafer handling apparatus operating under the Bernoulli principle to pick up, transport and deposit wafers, which apparatus includes a plate having a plurality of laterally oriented outlets and a central outlet for discharging gas in a pattern sufficient to develop a low pressure enviroment to pick up the wafer while bathing the wafer in radially outflowing gases to prevent intrusion and deposition on the wafer of particulate matter in suspension.
REFERENCES:
patent: 3523706 (1970-08-01), Logue
patent: 3539216 (1970-11-01), Forcier
patent: 3981687 (1976-09-01), Vig
patent: 4029351 (1977-06-01), Apgar et al.
patent: 4391733 (1983-07-01), Flanagan
patent: 4440553 (1984-04-01), Helmus
patent: 4553069 (1985-11-01), Purser
patent: 4574004 (1986-03-01), Schmidt-Ott
patent: 4828224 (1989-05-01), Crabb et al.
Crabb Richard
Ferro Armand P.
Goodwin Dennis L.
Robinson McDonald
Epsilon Technology Inc.
Spar Robert J.
Underwood Donald W.
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