Wafer handler having a flexible pad

Details Wafer handler having a flexible pad Wafer handler having a flexible pad

1996-01-29

1997-11-11

Kramer, Dean

Handling: hand and hoist-line implements

Utilizing fluid pressure

Venturi effect

294902, 414939, B25J 1506

Patent

active

056855885

ABSTRACT:
An improved wafer handler having a wafer chuck that properly picks up wafers from a wafer track of an ion implant machine is provided. The wafer handler comprises: an input arm having a wafer chuck and a wafer pad adjustably mounted to the wafer chuck. The wafer pad preferably has an oval shape. The wafer handler can pick up a horizontal wafer and set the wafer down on an angled surface. The oval shape, dimensions, flexible material and mounting screws of the wafer pad enable the pad to form a vacuum with the wafer and to properly handle the wafer. The wafer handler and wafer pad greatly reduce wafer breakage and damage to the implant machine from the broken wafers.

REFERENCES:
patent: 3084928 (1963-04-01), Opitz
patent: 3377096 (1968-04-01), Wood
patent: 4266905 (1981-05-01), Birk et al.
patent: 4529353 (1985-07-01), Dean et al.
patent: 4960298 (1990-10-01), Moroi
patent: 5374091 (1994-12-01), Gore et al.

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