Wafer guides for processing semiconductor substrates

Details Wafer guides for processing semiconductor substrates Wafer guides for processing semiconductor substrates

2005-11-01

2005-11-01

Novosad, Jennifer E. (Department: 3634)

Supports: racks

Special article

Platelike

Reexamination Certificate

active

06959823

ABSTRACT:
A wafer guide includes a horizontal support panel and at least three vertical panels attached on one surface of the support panel. Each of the vertical panels has a vertical body panel and a plurality of protrusions upwardly extended from a top surface of the vertical body panel. Gap regions between the protrusions act as slots for holding wafers. Sidewalls of the slots have a convex shaped profile when viewed from a top view, and bottom surfaces of the slots also have a convex shaped profile when viewed from a cross sectional view that crosses the vertical panels.

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English Abstract Only.

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