Special receptacle or package – For plate or sheet – Fragile or sensitive
Reexamination Certificate
2005-02-01
2005-02-01
Luong, Shian T. (Department: 3728)
Special receptacle or package
For plate or sheet
Fragile or sensitive
C206S710000
Reexamination Certificate
active
06848578
ABSTRACT:
A wafer container comprises a housing with a door frame, defining an opening for insertion and removal of wafers, and a door for insertion into the door frame. The door includes a wafer enclosure sealing arrangement for hermetically sealing the door with the door frame of the housing. The wafer enclosure sealing arrangement includes a first groove disposed about a perimeter of the interior surface of the door and a second groove disposed adjacent to the first groove and spaced laterally from the perimeter of the door. The sealing arrangement includes a support member disposed between the first and second grooves. The sealing arrangement also includes an elastomeric seal member having a first portion that is frictionally inserted into the second groove and extends around the door and a second portion that cantilevers downward into the second groove when the door and housing are joined.
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Entegris, Inc.
Luong Shian T.
Patterson Thuente Skaar & Christensen P.A.
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