Wafer edge structure measurement method

Details Wafer edge structure measurement method Wafer edge structure measurement method

2007-12-25

2007-12-25

Punnoose, Roy M. (Department: 2886)

Optics: measuring and testing

Dimension

Reexamination Certificate

active

10925497

ABSTRACT:
A method of determining the distance from an edge feature to a wafer edge. The wafer is put onto an image acquisition tool, and images are captured and classified. Based on the coordinates of the images and their classifications, the distance between an edge feature and the wafer edge is determined. Reference marks can be etched into the wafer to facilitate the measurement. The measurement technique is objective, and can be used to minimize the edge exclusion ring as well as defects that originate from the edge of the wafer.

REFERENCES:
patent: 6889113 (2005-05-01), Tasker et al.
patent: 6895109 (2005-05-01), Schemmel et al.

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