Wafer edge-defect detection and capacitive probe therefor

Details Wafer edge-defect detection and capacitive probe therefor Wafer edge-defect detection and capacitive probe therefor

2007-05-25

2009-12-08

Nguyen, Hoai-An D (Department: 2831)

Electricity: measuring and testing

Impedance, admittance or other quantities representative of...

Lumped type parameters

C324S686000, C324S754090

Reexamination Certificate

active

07629798

ABSTRACT:
A wafer edge-defect detection system with a probe assembly having one or more capacitive plates conforming in edge shape to an edge shape of a wafer; and processing electronics for electronically driving the one or more capacitive plates and for sensing an electrical signal representing capacitance between each one or more plates and the wafer. Filtering and demodulation techniques enhance the signal to noise ratio.

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patent: 6867855 (2005-03-01), Go et al.
patent: 7280200 (2007-10-01), Plemmons et al.
patent: 7366344 (2008-04-01), Sim

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