Wafer chuck illumination device for use in semiconductor...

Details Wafer chuck illumination device for use in semiconductor... Wafer chuck illumination device for use in semiconductor...

2008-01-15

2008-01-15

Toatley, Jr., Gregory J. (Department: 2877)

Optics: measuring and testing

Inspection of flaws or impurities

Surface condition

Reexamination Certificate

active

07319517

ABSTRACT:
A wafer chuck illumination device for illuminating a light source to detect a position of foreign substances polluting a wafer chuck is provided. The device includes a lamp for generating a white light source, and a collimator lens for transforming the white light source into a beam of parallel rays and for directing the beam of parallel rays to a wafer chuck for detecting and cleaning foreign substances on the wafer chuck.

REFERENCES:
patent: 5274434 (1993-12-01), Morioka et al.
patent: 5414515 (1995-05-01), Kawashima
patent: 5432607 (1995-07-01), Taubenblatt
patent: 5463459 (1995-10-01), Morioka et al.
patent: 5886432 (1999-03-01), Markle
patent: 2002/0018217 (2002-02-01), Weber-Grabau et al.
patent: 2002/0191180 (2002-12-01), Takeishi
patent: 2004/0207836 (2004-10-01), Chhibber et al.

Affiliated with

Also associated with

Rating

Wafer chuck illumination device for use in semiconductor... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Wafer chuck illumination device for use in semiconductor..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Wafer chuck illumination device for use in semiconductor... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2779114