Material or article handling – Apparatus for moving material between zones having different... – For carrying standarized mechanical interface type
Patent
1998-01-23
2000-07-04
Morse, Gregory A.
Material or article handling
Apparatus for moving material between zones having different...
For carrying standarized mechanical interface type
414416, 414937, 414939, B65G 4907
Patent
active
060829516
ABSTRACT:
A pod loading station and method of operation are provided for enabling the transfer and introduction of wafers into a processing system from a wafer pod. The pod loading station generally includes a movable receiving platform for supporting a wafer pod and a movable pod door receiver having a pod door latch actuating mechanism disposed thereon. The movable platform supports a wafer pod, moves the wafer pod into engagement with the pod door receiver, and then retracts to enable the door supported by the door receiver to be removed from the opening of the pod. The pod door receiver then lowers the pod door below the pod to enable access to the pod opening.
REFERENCES:
patent: 4776744 (1988-10-01), Stonestreet et al.
patent: 4917556 (1990-04-01), Stark et al.
patent: 4954721 (1990-09-01), Suzuki
patent: 5525024 (1996-06-01), Freerks et al.
patent: 5586585 (1996-12-01), Bonora et al.
patent: 5607276 (1997-03-01), Muka et al.
patent: 5609689 (1997-03-01), Kato et al.
patent: 5613821 (1997-03-01), Muka et al.
patent: 5664926 (1997-09-01), Sussman et al.
patent: 5713711 (1998-02-01), McKenna et al.
patent: 5772386 (1998-06-01), Mages et al.
patent: 5810537 (1998-09-01), Briner et al.
patent: 5829939 (1998-11-01), Iwai et al.
Belitsky Victor
Gantvarg Eugene
Nering Eric A.
Perlov Ilya
Applied Materials Inc.
Morse Gregory A.
LandOfFree
Wafer cassette load station does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Wafer cassette load station, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Wafer cassette load station will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-1480447