Wafer cassette

Special receptacle or package – Holder for a removable electrical component – For a semiconductor wafer

Reexamination Certificate

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Details

C206S454000, C211S041180

Reexamination Certificate

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06874638

ABSTRACT:
A wafer cassette comprises a case body and an adapter that supports substrates. There are adapters of various types corresponding to the size of the substrates to be supported. The case body and the adapter of any type are united in a manner such that fitting portions of the case body are fitted individually in fitting holes of the adapter.

REFERENCES:
patent: 3467242 (1969-09-01), De Rousse
patent: 4718549 (1988-01-01), Rissotti et al.
patent: 6039186 (2000-03-01), Bhatt et al.
patent: 7-326657 (1995-12-01), None

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