Special receptacle or package – Holder for a removable electrical component – For a semiconductor wafer
Reexamination Certificate
2005-04-05
2005-04-05
Gehman, Bryon P. (Department: 3728)
Special receptacle or package
Holder for a removable electrical component
For a semiconductor wafer
C206S454000, C211S041180
Reexamination Certificate
active
06874638
ABSTRACT:
A wafer cassette comprises a case body and an adapter that supports substrates. There are adapters of various types corresponding to the size of the substrates to be supported. The case body and the adapter of any type are united in a manner such that fitting portions of the case body are fitted individually in fitting holes of the adapter.
REFERENCES:
patent: 3467242 (1969-09-01), De Rousse
patent: 4718549 (1988-01-01), Rissotti et al.
patent: 6039186 (2000-03-01), Bhatt et al.
patent: 7-326657 (1995-12-01), None
Akiyama Shuji
Iijima Toshihiko
Obayashi Tadahiro
Gehman Bryon P.
Miraial Co., Ltd.
Tokyo Electron Limited
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