Wafer carrying-in/out apparatus

Details Wafer carrying-in/out apparatus Wafer carrying-in/out apparatus

2008-08-04

2009-10-27

Sikder, Selina (Department: 2912)

Equipment for production, distribution, or transformation of ene

Distribution, modification or control

Electron or vacuum tube

Design Patent

active

D0602882

CLAIM:
The ornamental design for a wafer carrying-in/out apparatus or the like, as shown and described.

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patent: 2004/0146378 (2004-07-01), Okabe et al.
patent: 2007/0031236 (2007-02-01), Chen
patent: 2007/0098527 (2007-05-01), Hall et al.

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