Wafer carrier with wafer retaining system

Details Wafer carrier with wafer retaining system Wafer carrier with wafer retaining system

2005-10-04

2005-10-04

Fidei, David T. (Department: 3728)

Special receptacle or package

Holder for a removable electrical component

For a semiconductor wafer

C206S454000, C211S041180

Reexamination Certificate

active

06951284

ABSTRACT:
In a preferred embodiment of the invention, a wafer retaining arrangement is incorporated into a transport module suitable for 300 mm wafers. The wafer retaining arrangement attaches to an interior of a door of the transport module and includes a framework, and a first and a second plurality of wafer engaging members that secure semiconductor wafers within the transport module and that extend laterally from respective first and second sidewall portions and are preferably parallel to one another. Each of the wafer engaging members includes an arm portion and a wafer engagement head spaced laterally from the respective sidewall portion, wherein the wafer engagement heads of the first plurality of wafer engaging members are in close proximity to the wafer engagement heads of the second plurality of wafer engaging members.

REFERENCES:
patent: 4043451 (1977-08-01), Johnson
patent: 4248356 (1981-02-01), Johnson
patent: 4555024 (1985-11-01), Voss et al.
patent: 4718549 (1988-01-01), Rissotti et al.
patent: 5207324 (1993-05-01), Kos
patent: 5253755 (1993-10-01), Maenke
patent: 5273159 (1993-12-01), Gregerson
patent: 5452795 (1995-09-01), Gallagher et al.
patent: 5586658 (1996-12-01), Nyseth
patent: 5711427 (1998-01-01), Nyseth
patent: 5782362 (1998-07-01), Ohori
patent: 5788082 (1998-08-01), Nyseth
patent: 6082540 (2000-07-01), Krampotich et al.
patent: 6267245 (2001-07-01), Bores et al.
patent: 6315124 (2001-11-01), Hirohata et al.
patent: 6354601 (2002-03-01), Krampotich et al.
patent: 6382419 (2002-05-01), Fujimori et al.
patent: 6591987 (2003-07-01), Wu et al.

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