Special receptacle or package – For plate or sheet – Fragile or sensitive
Reexamination Certificate
2005-12-20
2005-12-20
Gehman, Bryon P. (Department: 3728)
Special receptacle or package
For plate or sheet
Fragile or sensitive
C206S564000, C206S565000, C206S711000, C211S041180
Reexamination Certificate
active
06976585
ABSTRACT:
A carrier with ultraphobic surfaces for promoting more effective cleaning and drying of the carrier. In the invention, entire surfaces or portions of surfaces of a carrier are made ultraphobic. The ultraphobic surfaces of the carrier cause liquids that may come in contact with the surface, such as may be used in cleaning, to quickly and easily “roll off” without leaving a liquid film or substantial number of liquid droplets. As a result, less time and energy is expended in drying the surfaces, and redeposited residue is minimized, thereby improving overall process quality. In addition, the ultraphobic surfaces may be resistant to initial deposition of contaminants, where the contaminants may be in liquid or vapor form.
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Entegris, Inc.
Gehman Bryon P.
Patterson Thuente Skaar & Christensen P.A.
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