Wafer carrier with apertured door for cleaning

Details Wafer carrier with apertured door for cleaning Wafer carrier with apertured door for cleaning

2004-11-05

2008-03-18

Gehman, Bryon P (Department: 3728)

Special receptacle or package

Holder for a removable electrical component

For a semiconductor wafer

C206S454000

Reexamination Certificate

active

07344030

ABSTRACT:
A wafer carrier door having an inner door portion and an outer door portion. The inner door portion has a substantially continuous inner surface. The outer door portion extends over at least a portion of the inner door portion. The outer door portion has a plurality of apertures formed therein. The outer door portion is attached to the inner door portion.

REFERENCES:
patent: 5173273 (1992-12-01), Brewer
patent: 5711427 (1998-01-01), Nyseth
patent: 5713711 (1998-02-01), McKenna et al.
patent: 5785186 (1998-07-01), Babbs et al.
patent: 5915562 (1999-06-01), Nyseth et al.
patent: 5957292 (1999-09-01), Mikkelsen et al.
patent: 6248177 (2001-06-01), Halbmaier
patent: 6267245 (2001-07-01), Bores et al.
patent: 6412502 (2002-07-01), Bexten et al.
patent: 6749067 (2004-06-01), Eggum
patent: 6808352 (2004-10-01), Seita
patent: 6880718 (2005-04-01), Eggum
patent: 6945405 (2005-09-01), Bores et al.
patent: 2005/0111935 (2005-05-01), Kim et al.

Affiliated with

Also associated with

Rating

Wafer carrier with apertured door for cleaning does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Wafer carrier with apertured door for cleaning, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Wafer carrier with apertured door for cleaning will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3972715