Wafer carrier with an anti-slip surface

Details Wafer carrier with an anti-slip surface Wafer carrier with an anti-slip surface

1996-11-26

1999-01-12

Chin-Shue, Alvin C.

Supports: racks

Special article

Platelike

A47F 700

Patent

active

058575766

ABSTRACT:
A wafer carrier having an anti-slip structure formed on outward surface portions of side plates of the wafer carrier. The anti-slip structure may be composed of at least one of several shapes or structures such as grooves, round shape projections, and acute angle shaped projections, each which is formed on both the outward surface portions. The wafer carrier having such an anti-slip structure prevents the wafer carrier from slipping or falling while the wafer carrier is being transported.

REFERENCES:
patent: 4228902 (1980-10-01), Schulte
patent: 4471716 (1984-09-01), Milliren
patent: 4687097 (1987-08-01), Mortensen
patent: 5476176 (1995-12-01), Gregerson et al.
patent: 5538230 (1996-07-01), Sibley

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