Wafer carrier transport system interface

Details Wafer carrier transport system interface Wafer carrier transport system interface

1985-09-13

1988-02-09

Marbert, James B.

Handling: hand and hoist-line implements

Contact lens applicator

294 16, 294 681, B65D 2528

Patent

active

047237996

ABSTRACT:
The invention comprises a two, three or four short pin engagement system for engaging a wafer carrier for transporting semiconductor wafers by means of a three axis robotic transportation system for the purpose of processing semiconductor wafers in a factory. The multiple pin assembly allows a large reduction in travel distance with respect to prior art long rod engagement supports.

REFERENCES:
patent: 3923191 (1975-12-01), Johnson
patent: 4195871 (1980-04-01), Chilton et al.

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