Wafer carrier checker and method of using same

Details Wafer carrier checker and method of using same Wafer carrier checker and method of using same

2007-01-30

2007-01-30

Nguyen, Dung Van (Department: 3723)

Abrading

Precision device or process - or with condition responsive...

With indicating

C451S442000, C451S559000

Reexamination Certificate

active

11121367

ABSTRACT:
A tool and method for assessing whether a disk carrier, and especially a carrier for holding semiconductor disks, is properly dimensioned. The tool has a body that includes a socket in which a portion of the disk carrier will seat fully if the disk carrier is properly dimensioned. Alignment structures may be provided in the socket to align with features of the carrier to assist in determining whether the disk carrier is properly dimensioned. The socket may include two spaced apart cavities that correspond with end portions of walls of the disk carrier.

REFERENCES:
patent: 5485759 (1996-01-01), Goff et al.
patent: 5929766 (1999-07-01), Rochet et al.
patent: 5970807 (1999-10-01), Hsu et al.
patent: 6619930 (2003-09-01), Jansen et al.
patent: 6635197 (2003-10-01), Cortum et al.

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