Wafer carrier and method for handling of wafers with minimal con

Details Wafer carrier and method for handling of wafers with minimal con Wafer carrier and method for handling of wafers with minimal con

1998-07-10

2000-12-12

Morse, Gregory A.

Material or article handling

Load carried along a horizontal linear path

Carried via magnetic floating

414937, 414941, B65G 106

Patent

active

061589519

ABSTRACT:
The invention is a carrier comprising three support elements connected by an underlying frame. The periphery of a wafer rests upon the support elements. The invention also comprises a wafer handler with a plurality of arms. Spacers space the carrier above a base plate associated with a station in a wafer handling area. An arm slides beneath the frame and between the spacers, but the handler does not contact the wafer. A method of using the handler and carrier is provided where the handler lifts and rotates the carrier with the wafer through various stations in a wafer handling area. The handler is capable of moving a plurality of carriers and wafers simultaneously.

REFERENCES:
patent: 4306731 (1981-12-01), Shaw
patent: 4473455 (1984-09-01), Dean et al.
patent: 4779877 (1988-10-01), Shaw
patent: 5046909 (1991-09-01), Murdoch
patent: 5093550 (1992-03-01), Gerber et al.
patent: 5636964 (1997-06-01), Somekh et al.
patent: 5697748 (1997-12-01), Somekh et al.
patent: 5911326 (1999-06-01), Ikeda

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