Wafer boat or rack for holding semiconductor wafers

Details Wafer boat or rack for holding semiconductor wafers Wafer boat or rack for holding semiconductor wafers

1993-09-17

1995-08-29

Sincavage, Joel

Equipment for production, distribution, or transformation of ene

Distribution, modification or control

Semiconductor, transistor or integrated circuit

Patent

active

D03617521

REFERENCES:
patent: 4676008 (1987-06-01), Armstrong
patent: 4872554 (1989-10-01), Quernemoen
patent: 4993559 (1991-02-01), Cota
patent: 5129079 (1993-06-01), Nakamura

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