Wafer boat for use in a semiconductor wafer heat processing appa

Details Wafer boat for use in a semiconductor wafer heat processing appa Wafer boat for use in a semiconductor wafer heat processing appa

1997-07-24

1999-01-12

Vinson, Brian N.

Equipment for production, distribution, or transformation of ene

Distribution, modification or control

Semiconductor, transistor or integrated circuit

1303

Patent

active

D04040155

REFERENCES:
patent: D291413 (1987-08-01), Uehara et al.
patent: D361752 (1995-08-01), Yamaga
patent: D378823 (1997-04-01), Watanabe et al.
patent: 4743156 (1988-05-01), Raffay et al.
patent: 4857689 (1989-08-01), Lee
patent: 5174045 (1992-12-01), Thompson et al.
patent: 5314574 (1994-05-01), Takahashi
patent: 5320218 (1994-06-01), Yamashita et al.

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