Wafer boat for use in a semiconductor wafer heat processing appa

Equipment for production – distribution – or transformation of ene – Distribution – modification or control – Semiconductor – transistor or integrated circuit

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1303

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D04040155

REFERENCES:
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patent: D361752 (1995-08-01), Yamaga
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patent: 5174045 (1992-12-01), Thompson et al.
patent: 5314574 (1994-05-01), Takahashi
patent: 5320218 (1994-06-01), Yamashita et al.

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