Wafer alignment system

Details Wafer alignment system Wafer alignment system

2005-06-21

2005-06-21

Wachsman, Hal (Department: 2857)

Data processing: measuring, calibrating, or testing

Testing system

For transfer function determination

C702S095000, C702S150000, C700S121000

Reexamination Certificate

active

06909984

ABSTRACT:
A system is provided for producing an integrated circuit using a stepper and a scanner in successive stages. Calibration data developed for the transfer of a wafer from the stepper to the scanner while maintaining the same orientation is transformed, and the transformed data is used to align a rotated wafer on the scanner.

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patent: 6285033 (2001-09-01), Matsumoto
patent: 6549269 (2003-04-01), Nishi et al.
patent: 6671048 (2003-12-01), Leroux

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