Wafer aligning apparatus for semiconductor device fabrication

Details Wafer aligning apparatus for semiconductor device fabrication Wafer aligning apparatus for semiconductor device fabrication

1998-08-07

2000-08-08

Bueker, Richard

Material or article handling

Associated with semiconductor wafer handling

Wafer cassette transporting

B65G 6500

Patent

active

060992425

ABSTRACT:
A wafer aligning apparatus for semiconductor device fabrication includes a cassette support on which is mounted a cassette holding wafers immersed in a non-conducting fluid. A guide roller is composed of carbon fiber reinforced polyether and rotates in contact with circumferential edges of the wafers. A wafer support holds the wafers apart from the roller when flat zones of the wafers are aligned with the wafer support

REFERENCES:
patent: 5620295 (1997-04-01), Nishi
patent: 5845660 (1998-12-01), Shindo et al.
patent: 5895191 (1999-04-01), Bonora et al.
patent: 5940985 (1999-08-01), Kamikawa et al.

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