W-patterned tools for transporting/handling pairs of disks

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering

Reexamination Certificate

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C204S192120, C204S192160, C414S217000, C414S222010, C414S222070, C414S222080, C414S222130, C414S225010

Reexamination Certificate

active

07628895

ABSTRACT:
Various apparatus and methods are provided for handling and transporting pairs of disks. A transfer tool engages a pair of disks in gap merge orientation along the outer perimeter edge of the disks and maintains the orientation while transferring the pair of disks to a second location where the disks are transferred to other equipment or subjected to processing. Various disks carriers are also provided for handling and transporting multiple pairs of disks in gap merge orientation.

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