Voltage variable capacitor

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode

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Details

361280, 257312, 437180, 437235, H01G 700, H01L 1700

Patent

active

051738350

ABSTRACT:
A voltage variable capacitor (10) has as the base substrate a silicon wafer with a layer of high resistivity semiconductor material on top of the substrate. An insulating layer (16) of a metal oxide having a dielectric constant greater than the dielectric constant of the semiconductors (12), such as zirconium titanate, is formed on top of the high resistivity layer, and a metal electrode (18) is formed on the insulating layer (16). When the electrode is energized, a depletion layer (20) is formed in the high resistivity layer. By varying the voltage applied to the electrode, the capacitance of the device is altered.

REFERENCES:
patent: 3202891 (1965-08-01), Frankl
patent: 3512052 (1970-05-01), MacIver et al.
patent: 3634738 (1972-01-01), Leith et al.
patent: 3648340 (1972-03-01), MacIver
patent: 3809971 (1974-05-01), Hluchan et al.
patent: 3890635 (1975-06-01), Engeler
patent: 4005466 (1977-01-01), Dawson
patent: 4782350 (1988-11-01), Smith et al.

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