Voltage-controlled semiconductor device

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode

Reexamination Certificate

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Details

C257SE21382, C257SE29198, C257SE29197

Reexamination Certificate

active

07626232

ABSTRACT:
SiC-IGBTs, which have an inversion-type channel with high channel resistance and have high on-voltage due to an influence from the surface state of the interface between a gate insulating film and a base layer, are required to decrease the on-voltage.An embedded collector region is partially formed in a base layer which is formed on an emitter layer of a SiC semiconductor. A channel layer is formed on the base layer and the embedded collector region to constitute an accumulation-type channel. Consequently, at on time, holes are accumulated in the upper layer portion of the channel layer so that a low-resistant channel is formed. Current by the holes flows to the emitter layer through a channel from the collector region and becomes a base current for an npn transistor composed of the embedded collector region, the base region and the emitter region.

REFERENCES:
patent: 5917204 (1999-06-01), Bhatnagar et al.
patent: 2004/0104429 (2004-06-01), Takahashi et al.
patent: 10-27899 (1998-01-01), None
patent: 10-256529 (1998-09-01), None
patent: 10-284733 (1998-10-01), None
patent: 2001-291869 (2001-10-01), None
patent: 2002-231947 (2002-08-01), None
patent: 2003-31802 (2003-01-01), None
English translation of the International Preliminary Report on Patentability mailed Oct. 5, 2006 in corresponding PCT Application No. PCT/ JP2005/004834.
International Search Report of PCT/JP2005/004834 mailed Jun. 28, 2005.
Ryu et al., “High-Power P-Channel UMOS IGBT'S in 6H-SiC for High Temperature Operation”, Materials Science Forum, vols. 338-342, pp. 1427-1430 (2000).

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