Volatile lanthanum complexes and their uses

Details Volatile lanthanum complexes and their uses Volatile lanthanum complexes and their uses

1988-06-13

1990-01-16

Hunt, Brooks H.

Organic compounds -- part of the class 532-570 series

Organic compounds

Rare earth containing

556 1, 556 9, 556 12, 427250, 427252, C07F 500, C07F 708, C07C 1504, C23C 1606

Patent

active

048944467

ABSTRACT:
Homoleptic bis (.pi.-arene) yttrium or lanthanide complexes of formula ML.sub.2, wherein M is yttrium or a lanthanide metal and the L ligands are di or trisubstituted benzene derivatives, are provided. Certain of the complexes are volatile and are therefore of interest in the chemical vapour deposition. A process for their manufacture is described.

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