Radiant energy – Inspection of solids or liquids by charged particles – Analyte supports
Patent
1998-07-21
1999-12-21
Nguyen, Kiet T.
Radiant energy
Inspection of solids or liquids by charged particles
Analyte supports
H01J 3726
Patent
active
060052511
ABSTRACT:
A scanning mechanism is provided for use in a scanning probe microscope. The scanning mechanism includes a stationary portion; a moveable portion; a plurality of springs attaching the moveable portion to the fixed portion, the plurality of springs providing tension against movement of the moveable portion relative to the stationary portion, the tension provided by the plurality of springs having a substantially linear spring constant over a scan distance; and one or more voice coils attached to either the moveable portion or the stationary portion for moving the moveable portion relative to the stationary portion in one or more orthogonal directions.
REFERENCES:
patent: 4977544 (1990-12-01), Karaki et al.
patent: 4977779 (1990-12-01), Karaki et al.
patent: 5861624 (1999-01-01), Alexander et al.
Alexander John D.
Nguyen Thai
Tortonese Marco
Nguyen Kiet T.
Thermomicroscopes Corp.
Weitz David J.
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