Voice coil scanner for use in scanning probe microscope

Details Voice coil scanner for use in scanning probe microscope Voice coil scanner for use in scanning probe microscope

1998-07-21

1999-12-21

Nguyen, Kiet T.

Radiant energy

Inspection of solids or liquids by charged particles

Analyte supports

H01J 3726

Patent

active

060052511

ABSTRACT:
A scanning mechanism is provided for use in a scanning probe microscope. The scanning mechanism includes a stationary portion; a moveable portion; a plurality of springs attaching the moveable portion to the fixed portion, the plurality of springs providing tension against movement of the moveable portion relative to the stationary portion, the tension provided by the plurality of springs having a substantially linear spring constant over a scan distance; and one or more voice coils attached to either the moveable portion or the stationary portion for moving the moveable portion relative to the stationary portion in one or more orthogonal directions.

REFERENCES:
patent: 4977544 (1990-12-01), Karaki et al.
patent: 4977779 (1990-12-01), Karaki et al.
patent: 5861624 (1999-01-01), Alexander et al.

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