Visualization of photomask databases

Details Visualization of photomask databases Visualization of photomask databases

2007-01-23

2007-01-23

Tung, Kee M. (Department: 2628)

Computer graphics processing and selective visual display system

Computer graphics processing

Attributes

C345S590000, C382S149000

Reexamination Certificate

active

10396228

ABSTRACT:
Faster and more accurate techniques for displaying images are described. The techniques can be applied in various applications that include semiconductor fabrication processes. The invention uses preprocessed images to generate a user-selected image in order to increase the speed of image processing. The invention displays the pixels forming an image using grayscale shading in order to improve the accuracy of displaying the patterns used in photolithography processes. The techniques of the present invention can be used to display images that represent lithography patterns stored within memory devices or to display images captured by inspection or metrology devices.

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