Radiant energy – Inspection of solids or liquids by charged particles – Methods
Patent
1993-04-16
1994-10-18
Berman, Jack I.
Radiant energy
Inspection of solids or liquids by charged particles
Methods
250310, H01J 3700
Patent
active
053571100
ABSTRACT:
Apparatus for displaying a visual image of the X-ray response of a specimen comprises an electron beam source for exciting X-ray emissions from the specimen. A detector detects X-ray photons emitted by the specimen and generates output signals representing the energies of X-ray photons received from discrete pixels of the specimen in a plurality of energy bands. A set of look-up tables generate for each pixel and for each energy band visual colour component signals related to the mean energy of X-ray photons emitted from the pixel and detected by the detector in that energy band. The range of X-ray energies is mapped into a range of visual colours. An accumulator combines the colour component signals for each pixel. The colour components for each pixel are stored in a frame store which is connected to a monitor which displays an image defined by the colour components.
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Berman Jack I.
Beyer James
Link Analytical Limited
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