Vinylsilyl group-containing monodisperse polymeric compound and

Details Vinylsilyl group-containing monodisperse polymeric compound and Vinylsilyl group-containing monodisperse polymeric compound and

1986-05-07

1988-07-19

Schofer, Joseph L.

Synthetic resins or natural rubbers -- part of the class 520 ser

Synthetic resins

Polymers from only ethylenic monomers or processes of...

526183, 526279, C08F 446, C08F23008

Patent

active

047586400

ABSTRACT:
The invention provides a novel polymeric compound having crosslinkability by irradiation with actinic rays, e.g. ultraviolet light, and useful as a polymeric base ingredient of a negative type photoresist composition with high sensitivity and resistance against dry etching. The polymer is obtained by the anionic living polymerization of a vinylsilyl group-containing styrene derivative of the formula

REFERENCES:
patent: 4124751 (1978-11-01), Fischer et al.
patent: 4252925 (1981-02-01), Fukudo et al.
patent: 4301231 (1981-11-01), Atarashi et al.

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