Vibration-type cantilever holder and scanning probe microscope

Details Vibration-type cantilever holder and scanning probe microscope Vibration-type cantilever holder and scanning probe microscope

2006-11-09

2009-10-20

Souw, Bernard E (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

C250S307000, C250S310000, C310S311000, C310S323010, C310S323060, C310S328000, C073S104000, C073S105000, C324S520000, C324S690000, C324S762010, C359S196100, C359S197100, C359S198100, C359S199100, C369S126000, C369S127000, C369S129000, C850S001000, C850S021000, C850S029000, C850S033000, C850S040000, C850S052000, C850S053000, C850S063000

Reexamination Certificate

active

07605368

ABSTRACT:
A vibration-type cantilever holder holds a cantilever opposed to a sample. The holder supports a main body part of the cantilever at only its base end so that a probe at the free end of the cantilever can contact the sample. The holder has a cantilever-attaching stand on which the main body part is placed and fastened such that the cantilever is tilted at a predetermined angle with respect to the sample. A first vibration source is fastened to the cantilever-attaching stand and vibrates with a phase and an amplitude depending on a predetermined waveform signal, and the first vibration source is fastened at a first location to a holder main body. A second vibration source is fastened at a second location, which is spaced from the first location, to the holder main body and generates vibrations to offset vibrations traveling from the first vibration source to the cantilever-attaching stand and holder main body. The holder allows the cantilever to vibrate according to the vibrational characteristics of only the cantilever by counteracting additional vibrations.

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