Optics: measuring and testing – By light interference – For dimensional measurement
Reexamination Certificate
2009-03-30
2010-12-21
Connolly, Patrick J (Department: 2877)
Optics: measuring and testing
By light interference
For dimensional measurement
C356S497000
Reexamination Certificate
active
07855791
ABSTRACT:
A vibration-resistant interferometric scanning system and method are provided in the present invention. In the present invention, the brightness distribution in a high-coherence interference pattern is analyzed so as to perform a compensation action to lock the brightness distribution of a high-coherence interference pattern and consequently locking the fringe distribution of a low-coherence interference pattern or to perform a scanning operation composed of plural shifting actions with specified scanning distances in sequence and plural compensation actions to lock the fringe distribution in a low-coherence interference pattern corresponding to the surface profile of a measured object. Consequently, with the system and method of the present invention, the surface profile of a measured object disturbed by external or internal vibrations can be measured accurately and precisely.
REFERENCES:
patent: 5589938 (1996-12-01), Deck
patent: 5999263 (1999-12-01), Deck et al.
patent: 6624894 (2003-09-01), Olszak et al.
patent: 2005/0237535 (2005-10-01), Deck
patent: 2009/0207416 (2009-08-01), Xiangqian et al.
Chen Liang-Chia
Lin Shyh-Tsong
Yeh Sheng-Lih
Connolly Patrick J
Morris Manning & Martin LLP
National Taipei University of Technology
Xia Tim Tinkang
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