4. Coherent light generators
  5. Particular beam control device
  6. Scanning

Shyh-Tsong Lin

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System and method for generating a grating image

Coherent light generators – Particular beam control device – Scanning
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Vibration-resistant interferometric scanning system and...

Optics: measuring and testing – By light interference – For dimensional measurement
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2557508

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