Vibration damping in a carrier head

Details Vibration damping in a carrier head Vibration damping in a carrier head

2005-02-01

2005-02-01

Eley, Timothy V. (Department: 3724)

Abrading

Machine

Rotary tool

C451S041000, C451S288000, C451S290000

Reexamination Certificate

active

06848980

ABSTRACT:
A carrier head has a backing assembly with a substrate support surface, a housing connectable to a drive shaft to rotate with the drive shaft about a rotation axis, and a dampening material in a load path between the backing assembly and the housing. The dampening material reduces transmission of vibrations from the backing assembly to the housing.

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