Vibration damping for photolithographic lens mount

Details Vibration damping for photolithographic lens mount Vibration damping for photolithographic lens mount

2006-02-07

2010-11-02

Martinez, Joseph (Department: 2873)

Optical: systems and elements

Lens

With support

Reexamination Certificate

active

07826155

ABSTRACT:
A connection between two components supported in a mutually vibrating fashion has at least one connection element connecting the two components, and a gap located between the two components in which a medium is located. The gap has a width small enough to largely prevent a displacement of the medium inside the gap during comparatively fast relative movements between the two components.

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