Electricity: motive power systems – Impact – mechanical shock – or vibration-producing motors
Reexamination Certificate
2005-05-17
2005-05-17
Schuberg, Darren (Department: 2834)
Electricity: motive power systems
Impact, mechanical shock, or vibration-producing motors
C310S090500, C310S012060
Reexamination Certificate
active
06894449
ABSTRACT:
In order to remove vibration or improve a vibration control effect, and achieve device size reduction, an adjusting device is provided in which a weight of a support target object is supported by a pressure of an internal gas of a first chamber gas via a holding member and which adjusts a position in a gravity direction of the holding member by driving a movable member which changes an internal volume of the first gas chamber by changing an internal volume of a second gas chamber based on a state change of at least one of first and second gas chambers. Because of this, when the holding member is displaced in the gravity direction because of the vibration or the like, as the movable member is driven by the adjusting device, the holding member is maintained at an original position. Additionally, the movable member does not contact the support target object, so it does not directly deform the support target object, and the support target object is only driven by the change of the internal volume of the gas chambers; thus, even if the rigidity of the gas within the first gas chamber is high, there will be no problem regarding transmission of vibrations.
REFERENCES:
patent: 5448332 (1995-09-01), Sakakibara et al.
patent: 6328362 (2001-12-01), Isogai et al.
patent: 6337484 (2002-01-01), Loopstra et al.
patent: 6354576 (2002-03-01), Jacobs et al.
patent: 6473161 (2002-10-01), Cuijpers et al.
patent: 20020005939 (2002-01-01), Cuijpers et al.
patent: 06-283403 (1994-10-01), None
Jones Judson H.
Nikon Corporation
Oliff & Berridg,e PLC
Schuberg Darren
LandOfFree
Vibration control device, stage device and exposure apparatus does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Vibration control device, stage device and exposure apparatus, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Vibration control device, stage device and exposure apparatus will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3459606