Vibration angular-velocity sensor and process for producing it

Details Vibration angular-velocity sensor and process for producing it Vibration angular-velocity sensor and process for producing it

1996-07-02

1998-08-18

Oda, Christine K.

Measuring and testing

Speed, velocity, or acceleration

Angular rate using gyroscopic or coriolis effect

310329, G01P 302

Patent

active

057960003

ABSTRACT:
A vibrator is formed on a silicon substrate to become a base by the silicon-processing procedure and a thin film of a piezoelectric material is formed on the substrate by a method matching with the silicon-processing procedure. When an ac field of a frequency near the resonance frequency of the transverse vibration of the vibrator is applied to the thin film of the piezoelectric material, the piezoelectric reverse effect excites characteristic vibration in the vibrator. If a rotational motion is generated along the axis of the beam in that state, the Coriolis' force is generated in a direction perpendicular to both the axial direction and the vibration direction of the beam. This force deforms the beam in that direction. Detecting inductive charges produced in another piezoelectric thin film fixed on the vibrator because of the piezoelectric normal effect due to the deformation, the rotational, angular velocity can be obtained.

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