Via interconnect forming process and electronic component...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material

Reexamination Certificate

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C438S640000

Reexamination Certificate

active

06838372

ABSTRACT:
A process for masking an electronic component substrate involving application of a temporary mask material to the substrate to form a removably adhered temporary mask over the surface. Exemplary mask materials include polymer films and aqueous hardenable liquid coatings. An electronic component substrate having a temporary mask for masking the substrate surface from interconnect fill material.

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Khol et al.; “Air-Gaps for Electrical Interconnects”; pp. 49-51; Electrochemical and Solid-State Letters, 1(1) 49-51 (1998); May 27, 1998.

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