Very-high aperture projection objective

Details Very-high aperture projection objective Very-high aperture projection objective

2008-03-04

2008-03-04

Mack, Ricky (Department: 2873)

Optical: systems and elements

Lens

With field curvature shaping

C359S754000

Reexamination Certificate

active

11528379

ABSTRACT:
A very-high aperture, purely refractive projection objective is designed as a two-belly system with an object-side belly, an image-side belly and a waist (7) situated therebetween. The system diaphragm (5) is seated in the image-side belly at a spacing in front of the image plane. Arranged between the waist and the system diaphragm in the region of divergent radiation is a negative group (LG5) which has an effective curvature with a concave side pointing towards the image plane. The system is distinguished by a high numerical aperture, low chromatic aberrations and compact, material-saving design.

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