Heating – Work feeding – agitating – discharging or conveying...
Reexamination Certificate
2005-06-20
2008-08-26
Wilson, Gregory A (Department: 3749)
Heating
Work feeding, agitating, discharging or conveying...
C432S241000, C219S390000, C438S715000, C414S935000, C414S938000
Reexamination Certificate
active
07416405
ABSTRACT:
A vertical type of thermal processing apparatus of the present invention includes a thermal processing furnace having a furnace opening at a lower portion thereof. A boat holding objects to be processed in a tier-like manner in a vertical direction is adapted to be contained in the thermal processing furnace through the furnace opening. A lid supporting the boat is capable of closing the furnace opening. A transferring chamber is connected to the furnace opening. An elevating mechanism provided in the transferring chamber is configured to move up and down the lid in order to load and unload the boat into and out from the thermal processing furnace. A connecting port provided at a wall of the transferring chamber is capable of being connected to an opening of a conveying container for containing the objects to be processed. A first containing portion provided in the transferring chamber is capable of temporarily containing unprocessed objects to be processed for a next thermal process. A second containing portion provided in the transferring chamber is capable of temporarily containing processed objects to be processed conveyed out from the thermal processing furnace. A transferring mechanism transfers objects to be processed between the conveying container, the first containing portion, the second containing portion and the boat.
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Asari Satoshi
Mihara Katsuhiko
Smith, Gambrell & Gambrell, LLP
Tokyo Electron Limited
Wilson Gregory A
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