Cleaning and liquid contact with solids – Apparatus – With spray or jet supplying and/or applying means
Reexamination Certificate
2006-07-04
2006-07-04
Kornakov, M. (Department: 1746)
Cleaning and liquid contact with solids
Apparatus
With spray or jet supplying and/or applying means
C134S902000, C134S094100, C134S099100, C134S103200, C134S103300, C134S198000
Reexamination Certificate
active
07069937
ABSTRACT:
A method for processing a substrate is provided which includes generating a fluid meniscus on the surface of the vertically oriented substrate, and moving the fluid meniscus over the surface of the vertically oriented substrate to process the surface of the substrate.
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de Larios John
Garcia James P.
Ravkin Mike
Redeker Fred C.
Woods Carl
Kornakov M.
Lam Research Corporation
Martine & Penilla & Gencarella LLP
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