Vertical proximity processor

Details Vertical proximity processor Vertical proximity processor

2006-07-04

2006-07-04

Kornakov, M. (Department: 1746)

Cleaning and liquid contact with solids

Apparatus

With spray or jet supplying and/or applying means

C134S902000, C134S094100, C134S099100, C134S103200, C134S103300, C134S198000

Reexamination Certificate

active

07069937

ABSTRACT:
A method for processing a substrate is provided which includes generating a fluid meniscus on the surface of the vertically oriented substrate, and moving the fluid meniscus over the surface of the vertically oriented substrate to process the surface of the substrate.

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