Coating processes – Electrical product produced – Condenser or capacitor
Reexamination Certificate
2005-11-01
2005-11-01
Talbot, Brian K. (Department: 1762)
Coating processes
Electrical product produced
Condenser or capacitor
C257S303000, C257S306000, C438S239000, C438S243000, C438S253000, C438S397000
Reexamination Certificate
active
06960365
ABSTRACT:
A method of manufacturing a vertical metal-insulator-metal capacitor (MIMCap) (10) in regions (19) of an insulating layer (14). Trenches for both conductive lines and vertical MIMCap's are formed in the insulating layer (14), and regions (19) are covered by resist (20) while the conductive lines (24) are deposited on the wafer. The resist (20) is removed, and the MIMCap dielectric and top plate conductive material (28) is deposited, forming a vertical MIMCap in regions (19).
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Infineon - Technologies AG
Slater & Matsil L.L.P.
Talbot Brian K.
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