Vertical heat treatment system and automatic teaching method...

Details Vertical heat treatment system and automatic teaching method... Vertical heat treatment system and automatic teaching method...

2005-03-25

2009-06-16

Wilson, Gregory A (Department: 3749)

Heating

Work feeding, agitating, discharging or conveying...

C432S005000

Reexamination Certificate

active

07547209

ABSTRACT:
A transfer mechanism21of a vertical heat treatment system1includes a base capable of vertical movement and turning movement, and plural substrate support devices, disposed on the base so as to be movable anteroposterior, that hold wafers W. Provided on the base25is a first sensor45that emits a light beam directed toward a direction in which the substrate support device20moves anteroposterior, and detects the target member upon receipt of a reflected light of the light beam. Provided on two tip end portions of the substrate support device20is a second sensor40that detects the target member upon interruption of a light beam traveling between the tip end portions by the target member. When a target member44provided at its specific positions with projections49and50is placed at a position in a wafer boat8,the base25moves vertically and turns, and the substrate support device20moves anteroposterior. The position of the target member, or the transfer target position of the wafer, is automatically detected based on the detection signals of the first sensor45and the second sensor obtained at the time and encoder values of drive systems relating to the movement of the base25and the substrate support member20.

REFERENCES:
patent: 4439146 (1984-03-01), Sugita
patent: 5409348 (1995-04-01), Suzuki
patent: 5562383 (1996-10-01), Iwai et al.
patent: 5829939 (1998-11-01), Iwai et al.
patent: 6878955 (2005-04-01), Harris et al.
patent: 2003/0170583 (2003-09-01), Nakashima et al.
patent: 2 223 470 (1990-04-01), None
patent: 09-102527 (1997-04-01), None
patent: 11-163084 (1999-06-01), None
patent: 11-186360 (1999-07-01), None
patent: 2002-110769 (2002-04-01), None
patent: 2002-164406 (2002-06-01), None
patent: 2003-165078 (2003-06-01), None
patent: 2005-260176 (2005-09-01), None
patent: 99/02996 (1999-01-01), None
patent: 03/022534 (2003-03-01), None
PCT Translation of International Preliminary Report on Patentability (PCT/JP2005/005529) (Form PCT/IPEA/409), dated Jan. 2004.
PCT Notification of Transmittal of Translation of the International Preliminary Report on Patentability (PCT/JP2005/005529) (Form PCT/IB/338), dated Jan. 2004.
Supplementary European Search Report.

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