Vertical heat treatment apparatus with vented heat insulation co

Details Vertical heat treatment apparatus with vented heat insulation co Vertical heat treatment apparatus with vented heat insulation co

1992-07-08

1994-05-03

Evans, Geoffrey S.

Electric heating

Heating devices

Combined with container, enclosure, or support for material...

392416, 118725, 118730, H01L 2100

Patent

active

053089553

ABSTRACT:
In a vertical type of heat treatment apparatus, a cover for covering an opening portion at a lower end of a reaction chamber is configured from a heat retention cylinder cover and a heat retention cylinder support plate. This cover is made so that the lower end is open and so that the upper end is a cylindrical shape with a closed end. The heat retention cylinder is disposed inside a region which is surrounded by the cover, and the heat retention cylinder is supported by the support plate, and the closed end portion of the heat retention cylinder and the support plate both have vent holes formed therein so that the inside of the heat retention cylinder is maintained at atmospheric pressure. The cover airtightly separates the heat retention cylinder from the heat treating region and so there is no contamination from the heat retention cylinder, and the heat retention cylinder is maintained at atmospheric pressure and so there is no danger of destruction of the heat retention portion.

REFERENCES:
patent: 4926793 (1990-05-01), Arima et al.
patent: 5029554 (1991-07-01), Miyashita et al.
patent: 5127365 (1992-07-01), Koyama et al.
patent: 5171972 (1992-12-01), Hidano

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