Vertical gate semiconductor device and method for...

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode

Reexamination Certificate

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C257S368000, C257SE27091, C257SE29201

Reexamination Certificate

active

07372088

ABSTRACT:
A source region is formed by performing ion implantation plural times to diffuse an impurity from the upper surface of a semiconductor region toward a region far dawn therefrom and to increase impurity concentration in the vicinity of the upper surface of the semiconductor region, whereby the source region and a gate electrode are overlapped with each other surely. Thus, offset between the gate and the source is prevented and an excellent ohmic contact is formed between a source electrode and the source region.

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