Vertical-cavity surface-emitting semiconductor laser device

Coherent light generators – Particular active media – Semiconductor

Reexamination Certificate

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Details

C372S045010, C372S050100, C372S050110

Reexamination Certificate

active

07885307

ABSTRACT:
A vertical-cavity surface-emitting (VCSEL) device has a layer structure including a top DBR mirror, an active layer, a current confinement oxide layer, and a bottom DBR mirror, the layer structure being configured as a mesa post. The current confinement oxide layer has a central current injection area and a peripheral current blocking area oxidized from the sidewall of the mesa post. The mesa post has a substantially square cross-sectional shape, thereby allowing an oxidation heat treatment to configure a substantially circular current injection area in the current-confinement oxide layer.

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