Semiconductor device manufacturing: process – Making device or circuit emissive of nonelectrical signal – Mesa formation
Reexamination Certificate
2007-07-17
2007-07-17
Malsawma, Lex (Department: 2823)
Semiconductor device manufacturing: process
Making device or circuit emissive of nonelectrical signal
Mesa formation
C257SE33011, C372S046013
Reexamination Certificate
active
10978346
ABSTRACT:
In a vertical cavity surface emitting laser diode manufactured on a non-off-angle substrate with a (100)-oriented plane or the like, anisotropic stress is applied to a central portion of an active layer by forming a asymmetrical oxidation structure in an Al high concentration portion in the mesa, so that polarization controllability of a device can be improved.
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Ezaki Mizunori
Nishigaki Michihiko
Takaoka Keiji
Kabushiki Kaisha Toshiba
Malsawma Lex
Oblon & Spivak, McClelland, Maier & Neustadt P.C.
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