Versatile system for chromium based diffusion barriers in...

Details Versatile system for chromium based diffusion barriers in... Versatile system for chromium based diffusion barriers in...

2005-06-28

2005-06-28

Zarabian, Amir (Department: 2822)

Active solid-state devices (e.g., transistors, solid-state diode

Field effect device

Having insulated electrode

C257S309000, C257S296000, C257S297000

Reexamination Certificate

active

06911689

ABSTRACT:
A versatile system providing Cr-based diffusion barriers and electrode structures utilizing such barriers is disclosed, including a semiconductor substrate (102), a dielectric layer (106) disposed upon the substrate, a Cr-based conductive layer (114) disposed upon the dielectric layer, and an electrode layer (116) disposed upon the conductive layer.

REFERENCES:
patent: 6090697 (2000-07-01), Xing et al.
patent: 6150692 (2000-11-01), Iwanaga et al.
patent: 6261934 (2001-07-01), Kraft et al.
patent: 6350643 (2002-02-01), Hintermaier et al.
patent: 6485988 (2002-11-01), Ma et al.
patent: 6518070 (2003-02-01), Alluri et al.

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