Data processing: measuring – calibrating – or testing – Testing system – Signal generation or waveform shaping
Reexamination Certificate
2006-04-25
2009-11-17
Nghiem, Michael P (Department: 2863)
Data processing: measuring, calibrating, or testing
Testing system
Signal generation or waveform shaping
C702S079000
Reexamination Certificate
active
07620516
ABSTRACT:
The present invention relates to process I/O controllers for semiconductor manufacturing to which a tool host can delegate data collection, monitoring and control tasks. In particular, it relates to process I/O controllers that can perform more than one of data collection, monitoring, control and response to commands from a tool host with statistically repeatable performance and precision. Embodiments described use prioritized real time operating systems to control of semiconductor manufacturing tools and data collection from tool associated with the sensors. Statistically repeatable responsiveness to selected commands and to sensor inputs during selected recipe steps effectively reduces jitter.
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Gosch David Michael
Rozenboim Leonid
Beffel, Jr. Ernest J.
Haynes Beffel & Wolfeld LLP
MKS Instruments Inc.
Nghiem Michael P
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