Vented vacuum semiconductor wafer cassette

Details Vented vacuum semiconductor wafer cassette Vented vacuum semiconductor wafer cassette

1992-05-18

1993-06-08

Recla, Henry J.

Fluent material handling, with receiver or receiver coacting mea

Combined

141286, 141302, 414217, 25044111, 206334, 2065248, H05K 100

Patent

active

052170535

ABSTRACT:
A vacuum storage cassette for semiconductor wafers has one or more valves to allow the cassette to be evacuated, backfilled, and opened to the surround atmosphere and resealed without the need for a vacuum load-lock chamber.

REFERENCES:
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patent: 4181161 (1980-01-01), Kraus
patent: 4616683 (1986-10-01), Tullis et al.
patent: 4724874 (1988-02-01), Parikh et al.
patent: 4739882 (1988-04-01), Parikh et al.
patent: 4797054 (1989-01-01), Arii
patent: 4969556 (1990-11-01), Ishimaru et al.
patent: 4987933 (1991-01-01), Mack

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